三フッ化窒素 (NF3)
NF3は、半導体、ディスプレイおよび太陽電池の製造工程で使用され、
CVD工程の後、チャンバー内部の残留物を取り除くための洗浄用途に使用されます。
- ISO CONTAINER
- Y-CYLINDER
- BUNDLE
- INDIVIDUAL
SPECIFICATION
Unit : ppmvNF3 | O2+Ar | N2 | CF4 | CO | CO2 | N2O | SF6 | HF | H2O |
---|---|---|---|---|---|---|---|---|---|
99.999% | 1.0 | 1.0 | 10.0 | 1.0 | 1.0 | 1.0 | 1.0 | 1.0 | 1.0 |
NF3 | 99.999% |
---|---|
O2+Ar | 1.0 |
N2 | 1.0 |
CF4 | 10.0 |
CO | 1.0 |
CO2 | 1.0 |
N2O | 1.0 |
SF6 | 1.0 |
HF | 1.0 |
H2O | 1.0 |
CYLINDERS INFORMATION
TYPE | MATERIAL | FILLING WEIGHT | VALVE CONNECTION TYPE | |
---|---|---|---|---|
47L | Mn Steel | 15 / 20 / 22.7 kg | CGA/DISS640, CGA 330, JIS-22-14R/L etc. |
|
Bundle | Customized | |||
Y-CYLINDER | Cr-Mo Steel | 195 / 200 kg | CGA/DISS640 etc. | |
ISO Container | 20ft | 4,200 kg | ||
40ft | 8,000 kg |
TYPE | 47L |
---|---|
MATERIAL | Mn Steel |
FILLING WEIGHT | 15 / 20 / 22.7 kg |
VALVE CONNECTION TYPE | CGA/DISS640, CGA 330, JIS-22-14R/L etc. |
TYPE | Bundle |
---|---|
MATERIAL | Mn Steel |
FILLING WEIGHT | Customized |
VALVE CONNECTION TYPE | CGA/DISS640, CGA 330, JIS-22-14R/L etc. |
TYPE | Y-CYLINDER |
---|---|
MATERIAL | Cr-Mo Steel |
FILLING WEIGHT | 195 / 200 kg |
VALVE CONNECTION TYPE | CGA/DISS640 etc. |
TYPE | ISO Container | |
---|---|---|
MATERIAL | Cr-Mo Steel | |
FILLING WEIGHT | 20ft | 4,200 kg |
40ft | 8,000 kg | |
VALVE CONNECTION TYPE | CGA/DISS640 etc. |